| CPC H01L 23/49838 (2013.01) [H01L 21/4857 (2013.01); H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 23/49827 (2013.01); H05K 1/11 (2013.01); H05K 1/111 (2013.01); H05K 1/182 (2013.01); H01L 23/3128 (2013.01); H01L 23/3135 (2013.01); H01L 23/5383 (2013.01); H01L 24/16 (2013.01); H01L 24/48 (2013.01); H01L 25/0657 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/48229 (2013.01); H05K 1/0284 (2013.01); H05K 1/0298 (2013.01); H05K 1/0306 (2013.01); H05K 1/0313 (2013.01); H05K 1/115 (2013.01); H05K 1/18 (2013.01); H05K 1/181 (2013.01); H05K 2201/10378 (2013.01)] | 18 Claims |

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1. A connection structure comprising:
a first passivation layer;
a first conductive pattern that penetrates the first passivation layer and partially protrudes upwardly from the first passivation layer;
a second passivation layer on the first passivation layer and covering the first conductive pattern;
a second conductive pattern on the second passivation layer, the second conductive pattern comprises a second head segment that horizontally extends on an uppermost surface of the second passivation layer and a second tail segment that vertically penetrates the second passivation layer and connected to the first conductive pattern;
a third passivation layer on the second passivation layer and covering the second conductive pattern; and
a third conductive pattern on the third passivation layer, the third conductive pattern comprises a third head segment that horizontally extends on an uppermost surface of the third passivation layer and a third tail segment that vertically penetrates the third passivation layer;
wherein a thickness of the third head segment is greater than a thickness of the second head segment, and smaller than a thickness of the first conductive pattern, and
wherein the second passivation layer is the thickest among the first passivation layer, the second passivation layer, and the third passivation layer.
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