US 12,243,795 B2
Semiconductor device
Shinya Soneda, Tokyo (JP); and Akihiko Furukawa, Tokyo (JP)
Assigned to Mitsubishi Electric Corporation, Tokyo (JP)
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
Filed on Apr. 13, 2022, as Appl. No. 17/719,949.
Claims priority of application No. 2021-111362 (JP), filed on Jul. 5, 2021.
Prior Publication US 2023/0005809 A1, Jan. 5, 2023
Int. Cl. H01L 27/06 (2006.01); H01L 23/34 (2006.01); H01L 29/10 (2006.01); H01L 29/739 (2006.01); H01L 29/872 (2006.01)
CPC H01L 23/34 (2013.01) [H01L 27/0664 (2013.01); H01L 29/1095 (2013.01); H01L 29/7397 (2013.01); H01L 29/872 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A semiconductor device comprising:
a temperature detection region;
a switching element region that at least partially surrounds the temperature detection region in plan view; and
a signal pad region,
wherein the temperature detection region is provided with a diffusion layer of a second conductivity type provided on a surface layer of a drift layer of a first conductivity type, a well layer of the first conductivity type provided on a surface layer of the diffusion layer and electrically connected to an anode electrode, and a cathode layer of the first conductivity type provided on a surface layer of the well layer and electrically connected to a cathode electrode,
the cathode layer has a higher impurity concentration than the well layer,
the switching element region is provided with a base layer of the second conductivity type provided on a surface layer of a semiconductor layer of the first conductivity type, a source layer of the first conductivity type provided partially on a surface layer of the base layer, a plurality of trenches provided from an upper surface of the base layer to an inside of the semiconductor layer, and a plurality of gate electrodes each provided to be surrounded by a gate insulating film in one of the plurality of trenches, and
the signal pad region is provided with an anode pad electrically connected to the anode electrode and a cathode pad electrically connected to the cathode electrode.