| CPC H01L 21/68742 (2013.01) | 8 Claims |
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1. An assembly for supporting a substrate, the assembly comprising:
a support frame having at least one insertion hole, the insertion hole having an inner movement hole, a screw hole positioned outside the inner movement hole, and an outer movement hole positioned outside the screw hole; and
a substrate support member including a shaft body and a pin shaft connected to the shaft body to support the substrate in contact, wherein the shaft body has an inner screw body inserted into the insertion hole and positioned in the inner movement hole, a connection body disposed between the inner screw body and the pin shaft and positioned in the screw hole, and an outer body disposed between the connection body and the pin shaft and positioned in the outer movement hole,
wherein an inner diameter of the screw hole is smaller than a diameter of the inner movement hole and an outer diameter of the inner screw body, and the inner screw body is capable of passing through the screw hole by rotation,
wherein the inner diameter of the screw hole is smaller than a diameter of the outer movement hole and a diameter of the outer body, and
wherein the insertion hole is recessed from one surface of the support frame, and one end of the shaft body is capable of being inserted into the insertion hole through an entrance of the insertion hole.
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