US 12,243,758 B2
Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein
Shota Kaneko, Koshi (JP); Shigemi Oono, Koshi (JP); and Norihide Sagara, Koshi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Oct. 30, 2020, as Appl. No. 17/084,934.
Claims priority of application No. 2019-202929 (JP), filed on Nov. 8, 2019.
Prior Publication US 2021/0143033 A1, May 13, 2021
Int. Cl. G05B 19/406 (2006.01); H01L 21/67 (2006.01); H04N 7/18 (2006.01)
CPC H01L 21/67126 (2013.01) [G05B 19/406 (2013.01); H04N 7/188 (2013.01); G05B 2219/45031 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A monitoring system for a sealing apparatus, the sealing apparatus configured to seal a substrate treatment apparatus by a housing and fill a space sealed by the housing with a predetermined gas atmosphere, the monitoring system comprising:
at least two laser sensors for a region which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and
a controller configured to output a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by at least one of the two laser sensors or output a notification signal based on the detection result, wherein
the housing has an upper surface and four side surfaces,
a U-shaped space in plan view is formed between the housing and the substrate apparatus,
the two laser sensors are installed, in the U-shaped space, respectively at each of two opposing corner portions located on a diagonal line in plan view of the housing so as to eliminate a blind spot in the U-shaped space, and an installation height of the two laser sensors is 100 to 300 mm from a floor surface in the U-shaped space, and
each of the two laser sensors scans a laser beam by reciprocally turning in a predetermined angle range and scans a region from a side surface of the four side surfaces of the housing to the substrate treatment apparatus in the U-shaped space.