US 12,243,757 B2
Flange and apparatus for processing substrates
Jeroen de Jonge, Almere (NL); Sumit Sachdeva, Best (NL); Lucian Jdira, Nieuw Vennep (NL); Julien Laurentius Antonius Maria Keijser, Amersfoort (NL); and Theodorus G. M. Oosterlaken, Oudewater (NL)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 18, 2021, as Appl. No. 17/323,288.
Claims priority of provisional application 63/028,102, filed on May 21, 2020.
Prior Publication US 2021/0366742 A1, Nov. 25, 2021
Int. Cl. H01L 21/67 (2006.01); F27B 17/00 (2006.01); F27D 5/00 (2006.01); F27D 9/00 (2006.01); H01L 21/673 (2006.01)
CPC H01L 21/67109 (2013.01) [F27B 17/0025 (2013.01); F27D 5/0037 (2013.01); H01L 21/67303 (2013.01); F27D 2009/0013 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A flange for a process tube in an apparatus for processing substrates, the flange being provided with an opening for in use giving access to a process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange, wherein a material with a heat conductivity between 0.1 and 40 W/m K is at least partially provided in between the cooling fluid and the rest of the flange, wherein the flange has a space that is created in a recess in the outer surface of the flange for at least partially accommodating the cooling channel, and wherein the cooling channel has a substantially circular cross section and the recess has a substantially rectangular cross section with a recess opening slightly smaller than the outer radius of the circular cross section of the cooling channel so that the cooling channel touches the recess opening.