US 12,243,730 B2
Slit diaphragm
Peter Weipert, Schöllkrippen (DE)
Assigned to SINGULUS TECHNOLOGIES AG, Kahl am Main (DE)
Appl. No. 18/020,017
Filed by SINGULUS TECHNOLOGIES AG, Kahl am Main (DE)
PCT Filed Jun. 25, 2021, PCT No. PCT/EP2021/067511
§ 371(c)(1), (2) Date Feb. 6, 2023,
PCT Pub. No. WO2022/033757, PCT Pub. Date Feb. 17, 2022.
Claims priority of application No. 10 2020 004 935.4 (DE), filed on Aug. 13, 2020.
Prior Publication US 2023/0274922 A1, Aug. 31, 2023
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01)
CPC H01J 37/3447 (2013.01) [C23C 14/3407 (2013.01); H01J 2237/0455 (2013.01); H01J 2237/0458 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A slit diaphragm system comprising at least two slit diaphragms arranged adjacent to each other, wherein each slit diaphragm comprises two movably mounted elongate diaphragm elements each having first and second longitudinal ends, wherein an elongate diaphragm slit of variable width is configured between the two elongate diaphragm elements, wherein the two first longitudinal ends are connected to a rotary drive unit and wherein the two second longitudinal ends are coupled to each other; wherein the at least two slit diaphragms arranged adjacent to each other are arranged and configured such that a diaphragm element of a first slit diaphragm in its completely opened state covers an area which is at least partially also covered by a diaphragm element of a second slit diaphragm in its completely opened state.