US 12,243,724 B2
Batch type substrate processing apparatus
Sung Ho Kang, Yongin-si (KR); Chang Dol Kim, Yongin-si (KR); Jun Kim, Yongin-si (KR); Suk Bum Yoo, Yongin-si (KR); and Choon Sik Jeong, Yongin-si (KR)
Assigned to EUGENE TECHNOLOGY CO., LTD., (KR)
Filed by EUGENE TECHNOLOGY CO., LTD., Yongin-Si (KR)
Filed on Feb. 9, 2023, as Appl. No. 18/108,009.
Claims priority of application No. 10-2022-0017524 (KR), filed on Feb. 10, 2022.
Prior Publication US 2023/0253191 A1, Aug. 10, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32568 (2013.01) [H01J 37/32091 (2013.01); H01J 37/3244 (2013.01); H01J 37/32559 (2013.01); H01J 2237/002 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A batch type substrate processing apparatus comprising:
a reaction tube having a processing space in which a plurality of substrates are accommodated;
a plurality of electrodes extending along a longitudinal direction of the reaction tube and disposed to be spaced apart from each other; and
an electrode protection part configured to protect the plurality of electrodes,
wherein the plurality of electrodes comprise:
first and second power supply electrodes spaced apart from each other; and
a ground electrode provided between the first power supply electrode and the second power supply electrode,
wherein the electrode protection part comprises:
a plurality of first electrode protection tubes provided in the first and second power supply electrodes, respectively;
a second electrode protection tube provided in the ground electrode; and
a plurality of connection tubes configured to connect each of the plurality of first electrode protection tubes to the second electrode protection tube so as to communicate with each other,
wherein the substrate processing apparatus further comprises:
a cooling gas supply part configured to supply a cooling gas into the plurality of first electrode protection tubes and the second electrode protection tube; and
a cooling gas discharge part configured to discharge the cooling gas from the plurality of first electrode protection tubes and the second electrode protection tube so as to generate a flow of the cooling gas,
wherein a flow rate of the cooling gas in each of the first electrode protection tubes is less than that of the cooling gas in the second electrode protection tube.