US 12,243,721 B2
Plasma generating device and process executing apparatus including the same
Dai Kyu Choi, Seoul (KR)
Assigned to NP HOLDINGS CO., LTD., Suwon-si (KR)
Appl. No. 18/002,922
Filed by NP Holdings Co., Ltd., Suwon-si (KR)
PCT Filed Aug. 17, 2021, PCT No. PCT/KR2021/010868
§ 371(c)(1), (2) Date Dec. 22, 2022,
PCT Pub. No. WO2022/035300, PCT Pub. Date Feb. 17, 2022.
Claims priority of application No. 10-2020-0102809 (KR), filed on Aug. 14, 2020; and application No. 10-2021-0107422 (KR), filed on Aug. 13, 2021.
Prior Publication US 2023/0245861 A1, Aug. 3, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32449 (2013.01) [H01J 37/32357 (2013.01); H01J 37/32513 (2013.01); H01J 37/32522 (2013.01); H01J 37/32862 (2013.01); H01J 37/32871 (2013.01); H01J 37/321 (2013.01); H01J 2237/002 (2013.01); H01J 2237/024 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/3321 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A plasma generating device comprising:
a reactor body having a gas injection hole on one side thereof; and
a collector connected to an opposite side of the reactor body and having a collection space in an interior thereof,
wherein the reactor body and the collector respectively provide a reaction space having a plasma channel in an interior of the reactor body and the interior of the collector,
wherein the reactor body has a shape, in which at least two branches are branched such that the at least two branches correspond to portions of a toroid connected to the collector, and further includes at least one insulator provided in the reactor body, and
wherein the insulator is provided at at least one of between bodies constituting the reactor body, and between the reactor body and the collector.