US 12,243,714 B2
Lens designs
Laura Del Tin, The Hague (NL); Almut Johanna Stegemann, Wateringen (NL); German Aksenov, Delft (NL); Diego Martinez Negrete Gasque, Delft (NL); and Pieter Lucas Brandt, Son (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Aug. 26, 2022, as Appl. No. 17/897,080.
Application 17/897,080 is a continuation of application No. PCT/EP2021/054008, filed on Feb. 18, 2021.
Prior Publication US 2022/0406563 A1, Dec. 22, 2022
Int. Cl. H01J 37/317 (2006.01); H01J 37/09 (2006.01); H01J 37/12 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/3177 (2013.01) [H01J 37/09 (2013.01); H01J 37/12 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/1205 (2013.01); H01J 2237/2817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A manipulator lensing device for focusing a beam of charged particles, wherein the manipulator lensing device comprises:
a first structure through which is formed an opening wherein a path of a beam of charged particles through the manipulator lensing device is substantially along a longitudinal axis of the opening;
a second structure with a surface wherein, in a plane orthogonal to the longitudinal axis and along a first portion of the longitudinal axis, the surface surrounds the opening;
a support that, in a plane orthogonal to the longitudinal axis and along at least part of the first portion of the longitudinal axis, connects the second structure to the first structure and surrounds the second structure so that the connection between the second structure and the first structure is symmetric around the longitudinal axis; and
an electrode arrangement provided on the surface of the second structure such that the electrode arrangement surrounds the longitudinal axis of the opening and, in a plane that is orthogonal to the longitudinal axis, the surface of the second structure surrounds the electrode arrangement; a first surface of the first structure being arranged such that, in a plane orthogonal to the longitudinal axis and along at least a second portion of the longitudinal axis of the opening, the first surface surrounds the opening;
a second surface of the first structure being arranged such that, in a plane orthogonal to the longitudinal axis and along at least a third portion of the longitudinal axis, the second surface surrounds the opening;
the surface of the second structure being arranged along the longitudinal axis between the first and second surfaces of the first structure
the electrode arrangement and the first surface of the first structure being separated from each other in a direction parallel to the longitudinal axis so that there is a first gap between the electrode arrangement and the first surface of the first structure; and
the electrode arrangement and the second surface of the first structure being separated from each other in a direction parallel to the longitudinal axis so that there is a second gap between the electrode arrangement and the second surface of the first structure,
wherein, along the longitudinal axis, an extent of the support is less than an extent of the surface of the second structure and/or electrode arrangement.