US 12,243,711 B2
Method, apparatus, and program for determining condition related to captured image of charged particle beam apparatus
Takahiro Nishihata, Tokyo (JP); Yuji Takagi, Tokyo (JP); Takuma Yamamoto, Tokyo (JP); Yasunori Goto, Tokyo (JP); and Yasutaka Toyoda, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
Filed on Jul. 1, 2022, as Appl. No. 17/855,888.
Claims priority of application No. 2021-124636 (JP), filed on Jul. 29, 2021.
Prior Publication US 2023/0032587 A1, Feb. 2, 2023
Int. Cl. H01J 37/22 (2006.01); G01N 23/2251 (2018.01); H01J 37/28 (2006.01)
CPC H01J 37/222 (2013.01) [G01N 23/2251 (2013.01); H01J 37/28 (2013.01); G01N 2223/6116 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A non-transitory computer-readable medium storing a program for determining a condition related to a captured image of a charged particle beam apparatus, when executed by a processor causes the processor to:
acquire a plurality of captured images:
each of the plurality of captured images being an image generated by irradiating a pattern formed on a wafer with a charged particle beam, and detecting electrons emitted from the pattern,
each of the plurality of captured images being an image captured according to one or more imaging conditions;
acquire teaching information for each of the plurality of captured images;
acquire one or more feature determination conditions; and
calculate a feature for each of the plurality of captured images based on each of the one or more feature determination conditions,
at least one of the one or more imaging conditions and the one or more feature determination conditions being plural;
acquire a regression curve of the feature and the teaching information based on the plurality of captured images under each of condition sets each including a combination of the one or more imaging conditions and the one or more feature determination conditions; and
select one or more of the condition sets based on the regression curve.