	US 12,243,710 B2
	Electron beam irradiation apparatus with overlapping beam columns and helping columns
Ryo Tajima, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Jun. 23, 2020, as Appl. No. 16/909,104.
Claims priority of application No. 2019-120613 (JP), filed on Jun. 28, 2019.
Prior Publication US 2020/0411275 A1, Dec. 31, 2020
Int. Cl. H01J 37/147 (2006.01); H01J 37/317 (2006.01)

CPC H01J 37/1474 (2013.01) [H01J 37/3177 (2013.01)]

7 Claims

1. A multi-column electron beam irradiation apparatus comprising:

a plurality of columns arranged to be adjacent to each other, each column comprising:

an electron beam generation source that generates an electron beam respectively;

a deflector that deflects the electron beam respectively; and

a beam scanner that controls the deflector respectively;

a storage that stores information on a main irradiation area of each column and information on a sub-irradiation area of each column, the main irradiation area of each column being a central part of an irradiation area of the column that can be irradiated with an electron beam by the column, and the sub-irradiation area of each column being a peripheral part of the irradiation area of the column that overlaps with the main irradiation area of a column adjacent to the column; and

a controller configured to:

determine, as a helping column, a column having a main irradiation area that is not included in a target irradiation area to be irradiated with an electron beam from among the plurality of columns when information on the target irradiation area is input; and

determine, as a helped column for the determined helping column, a column that is adjacent to the helping column and has a main irradiation area included in the target irradiation area from among the plurality of columns,

wherein the beam scanner of the helping column performs a helping irradiation control for performing electron beam irradiation in the sub-irradiation area of the helping column, thereby irradiating the target irradiation area of the helped column with an electron beam,

wherein the irradiation area of the helped or helper column does not move during the electron beam irradiation,

wherein the deflector of the helping column is separately operated from the deflector of the helped column when the electron beam irradiation to the helped column is conducted, and

wherein the main irradiation area of the helping column is not irradiated by the plurality of columns.

6. A controlling method for a multi-column electron beam irradiation apparatus in which a plurality of columns is arranged to be adjacent to each other,

each column comprising an electron beam generation source that generates an electron beam respectively, a deflector that deflects the electron beam respectively, and a beam scanner that controls the deflector respectively, and

information on a main irradiation area of each column and information on a sub-irradiation area of each column being stored in a storage of the electron beam irradiation apparatus, the main irradiation area of each column being a central part of an irradiation area of the column that can be irradiated with an electron beam by the column, and the sub-irradiation area of each column being a peripheral part of the irradiation area of the column that overlaps with the main irradiation area of a column adjacent to the column,

the controlling method comprising:

a step of determining, as a helping column, a column having a main irradiation area that is not included in a target irradiation area to be irradiated with an electron beam from among the plurality of columns when information on the target irradiation area is input; and

a step of determining, as a helped column for the determined helping column, a column that is adjacent to the helping column and has a main irradiation area included in the target irradiation area from among the plurality of columns,

wherein the irradiation area of the helped or helper column does not move during the electron beam irradiation,

wherein the deflector of the helping column is separately operated from the deflector of the helped column when the electron beam irradiation to the helped column is conducted, and

wherein the main irradiation area of the helping column is not irradiated by the plurality of columns.

7. A control program executed in a multi-column electron beam irradiation apparatus in which a plurality of columns is arranged to be adjacent to each other,

wherein the control program makes the electron beam irradiation apparatus perform:

a processing of determining, as a helping column, a column having a main irradiation area that is not included in a target irradiation area to be irradiated with an electron beam from among the plurality of columns when information on the target irradiation area is input; and

a processing of determining, as a helped column for the determined helping column, a column that is adjacent to the helping column and has a main irradiation area included in the target irradiation area from among the plurality of columns, and

the beam scanner of the helping column performs a helping irradiation control for performing electron beam irradiation in the sub-irradiation area of the helping column, thereby irradiating the target irradiation area of the helped column with an electron beam,

wherein the irradiation area of the helped or helper column does not move during the electron beam irradiation,

wherein the deflector of the helping column is separately operated from the deflector of the helped column when the electron beam irradiation to the helped column is conducted, and

wherein the main irradiation area of the helping column is not irradiated by the plurality of columns.