CPC H01J 37/08 (2013.01) [H01J 37/3171 (2013.01); H01J 37/32541 (2013.01)] | 20 Claims |
1. An ion source, comprising:
a source arc chamber having a conductive first end wall, a conductive second end wall, and a conductive sidewall defining an inner chamber space;
a repellent electrode positioned in the inner chamber space and secured to the first end wall through a shaft element of an insulator material, the repellent electrode including a repellent surface that includes a substantially polygonal shape and rounded vertices; and
a cathode positioned in the inner chamber space and secured to one or more of the conductive second end wall or the conductive sidewall.
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