US 12,242,765 B2
Information processing apparatus and information processing method
Naoki Miyata, Tochigi (JP); and Kenta Kita, Tochigi (JP)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 23, 2023, as Appl. No. 18/492,587.
Application 18/492,587 is a continuation of application No. 17/239,332, filed on Apr. 23, 2021, granted, now 11,829,676.
Claims priority of application No. 2020-079055 (JP), filed on Apr. 28, 2020.
Prior Publication US 2024/0053941 A1, Feb. 15, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G06F 3/14 (2006.01); G03F 7/00 (2006.01); G03F 9/00 (2006.01); G06F 3/147 (2006.01); G06F 16/901 (2019.01); G06F 16/9038 (2019.01)
CPC G06F 3/14 (2013.01) [G03F 7/70491 (2013.01); G03F 7/70633 (2013.01); G03F 9/7046 (2013.01); G06F 3/147 (2013.01); G06F 16/9024 (2019.01); G06F 16/9038 (2019.01)] 14 Claims
OG exemplary drawing
 
1. An information processing apparatus comprising:
a processor; and
a memory for storing instructions to be executed by the processor,
wherein the instructions stored in the memory are executed by the processor to:
acquire information containing first process data indicating a result of a substrate process in a first recipe and second process data indicating a result of a substrate process in a second recipe different from the first recipe, and
control a display on a display apparatus based on the acquired information, and
wherein control is performed to display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region.