| CPC G06F 3/14 (2013.01) [G03F 7/70491 (2013.01); G03F 7/70633 (2013.01); G03F 9/7046 (2013.01); G06F 3/147 (2013.01); G06F 16/9024 (2019.01); G06F 16/9038 (2019.01)] | 14 Claims |

|
1. An information processing apparatus comprising:
a processor; and
a memory for storing instructions to be executed by the processor,
wherein the instructions stored in the memory are executed by the processor to:
acquire information containing first process data indicating a result of a substrate process in a first recipe and second process data indicating a result of a substrate process in a second recipe different from the first recipe, and
control a display on a display apparatus based on the acquired information, and
wherein control is performed to display, on the display apparatus, a first screen displaying a first data group in which the first process data is arranged chronologically and a second data group in which the second process data is arranged chronologically, the first screen displaying the first data group in a region and the second data group in another region.
|