| CPC G05B 23/024 (2013.01) [G05B 19/045 (2013.01); G05B 23/0259 (2013.01)] | 18 Claims |

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1. A method for controlling a non-product wafer, comprising:
monitoring a state of the non-product wafer;
obtaining usage information of the non-product wafer;
receiving a production instruction and controlling the non-product wafer according to the state and the usage information of the non-product wafer;
wherein the monitoring comprises:
analyzing and recording a reason for which the non-product wafer is in the state.
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