US 12,242,205 B2
Reaction chamber with stop-gapped vacuum seal
Byung-Jin Choi, Austin, TX (US); Seth J. Bamesberger, Austin, TX (US); and Alex Ruiz, Spicewood, TX (US)
Assigned to Canon Kabushiki Kaisha, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Nov. 30, 2021, as Appl. No. 17/538,066.
Prior Publication US 2023/0168592 A1, Jun. 1, 2023
Int. Cl. G03F 7/00 (2006.01); C23C 16/44 (2006.01); F16J 15/10 (2006.01); F16J 15/447 (2006.01)
CPC G03F 7/70808 (2013.01) [C23C 16/4409 (2013.01); F16J 15/104 (2013.01); F16J 15/447 (2013.01); G03F 7/0002 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A system comprising:
one or more walls of a reaction chamber;
an adjustable gap in the one or more walls, wherein the adjustable gap is formed between a first gap surface and a second gap surface facing the first gap surface, and wherein a distance between the first gap surface and the second gap surface is adjustable;
a plurality of stops, wherein each stop of the plurality of stops is positioned on either the first gap surface or the second gap surface, wherein the plurality of stops ensure a minimum distance of the adjustable gap, wherein a total length of the plurality of stops is less than 1% of a length of the first gap surface; and
one or more vacuum ports in the first gap surface or the second gap surface,
wherein the vacuum ports, of the one or more vacuum ports, that are in the first gap surface face the second gap surface, and
wherein the vacuum ports, of the one or more vacuum ports, that are in the second gap surface face the first gap surface.