US 12,242,112 B2
Electro-optical conversion system
Sébastien Hentz, Grenoble (FR); Ivan Favero, Paris (FR); Guillaume Jourdan, Grenoble (FR); Julien Renard, Seyssinet-Pariset (FR); and Nicolas Roch, Grenoble (FR)
Assigned to COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris (FR); and UNIVERSITE DE PARIS, Paris (FR)
Filed by COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES, Paris (FR); CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris (FR); and UNIVERSITE DE PARIS, Paris (FR)
Filed on Apr. 19, 2022, as Appl. No. 17/724,011.
Claims priority of application No. 2104085 (FR), filed on Apr. 20, 2021.
Prior Publication US 2022/0334314 A1, Oct. 20, 2022
Int. Cl. G02B 6/293 (2006.01); G02B 6/12 (2006.01); H04B 10/2575 (2013.01); H04B 10/50 (2013.01)
CPC G02B 6/2934 (2013.01) [G02B 6/12009 (2013.01); H04B 10/25759 (2013.01); H04B 10/503 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electro-optical conversion system comprising:
an opto-mechanical conversion device including:
a ring cavity formed by an optical waveguide which extends along an annular closed curve,
a micromechanical resonator comprising at least one microbeam, and
a zipper type element integrated to the ring cavity, said zipper type element including a first arm and a second arm which extend parallel to each other, opposite each other, the first arm being made on a portion of the ring waveguide while the second arm is made on the microbeam, the microbeam and said portion of the ring waveguide being laterally separated from each other by a gap which varies at least locally when the microbeam oscillates, and comprising
an electrical capacitor that includes a first electrode and a second electrode, the first electrode moving relative to the second electrode when said microbeam oscillates.