US 12,241,908 B2
Vibration rectification error correction device, sensor module, and vibration rectification error correction method
Masayoshi Todorokihara, Suwa (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Nov. 28, 2022, as Appl. No. 18/070,080.
Claims priority of application No. 2021-192657 (JP), filed on Nov. 29, 2021.
Prior Publication US 2023/0168272 A1, Jun. 1, 2023
Int. Cl. G01P 15/097 (2006.01); G01D 18/00 (2006.01); G01P 15/18 (2013.01)
CPC G01P 15/097 (2013.01) [G01D 18/00 (2013.01); G01P 15/18 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A vibration rectification error correction device comprising:
a reference signal generation circuit configured to output a reference signal;
a frequency delta-sigma modulation circuit configured to perform a frequency delta-sigma modulation on the reference signal using a measurement target signal to generate a frequency delta-sigma modulation signal;
a first filter which is disposed in a posterior stage of the frequency delta-sigma modulation circuit, receives the frequency delta-sigma modulation signal, operates a first filter operation on the frequency delta-sigma modulation signal in sync with the measurement target signal, and generates a first filtered signal; and
a second filter which is disposed in a posterior stage of the first filter, and, receives the first filtered signal, receives a first frequency signal, operates a second filter operation on the first filtered signal in sync with the first frequency signal, and generates a second filtered signal,
wherein the first frequency signal is asynchronous with the reference signal.