US 12,241,860 B2
Sensor and manufacturing method thereof
Yurina Amamoto, Kyoto (JP); and Shunsuke Akasaka, Kyoto (JP)
Assigned to ROHM Co., LTD., Kyoto (JP)
Filed by ROHM Co., LTD., Kyoto (JP)
Filed on Oct. 13, 2021, as Appl. No. 17/499,991.
Claims priority of application No. 2020-173784 (JP), filed on Oct. 15, 2020.
Prior Publication US 2022/0120708 A1, Apr. 21, 2022
Int. Cl. G01N 27/416 (2006.01); C23F 1/02 (2006.01); C23F 1/12 (2006.01); G01N 1/44 (2006.01); G01N 27/407 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/4163 (2013.01) [C23F 1/02 (2013.01); C23F 1/12 (2013.01); G01N 1/44 (2013.01); G01N 27/407 (2013.01); G01N 33/0027 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a substrate that includes a major surface;
a first nitride layer;
a second nitride layer;
a first insulating layer;
a sensor part that includes:
a gas flow path formed of a porous material, wherein a film density of the gas flow path is equal to or lower than 80%, and
a first porous electrode formed on the gas flow path; and
at least one of a heater or a temperature sensor, wherein
the heater is configured to heat the sensor part,
the temperature sensor is configured to measure temperature of the sensor part,
the sensor part and the at least one of the heater or the temperature sensor are stacked over the major surface,
the second nitride layer is on the first nitride layer,
the temperature sensor is on the first nitride layer,
the temperature sensor is embedded in the second nitride layer,
the heater is embedded in the first insulating layer,
the first nitride layer is between the first insulating layer and the second nitride layer,
the first nitride layer is different from the first insulating layer,
the gas flow path is between the second nitride layer and the first porous electrode,
the at least one of the heater or the temperature sensor is an interconnect having forward tapered side surfaces,
the at least one of the heater or the temperature sensor includes a metal interconnect layer, and
the forward tapered side surfaces of the interconnect overlap with the gas flow path in plan view of the major surface.