US 12,241,848 B2
Inspection apparatus and inspection method
Takeo Tsukamoto, Niigata (JP)
Assigned to CANON ANELVA CORPORATION, Kawasaki (JP)
Filed by CANON ANELVA CORPORATION, Kawasaki (JP)
Filed on Jul. 11, 2023, as Appl. No. 18/350,361.
Application 18/350,361 is a continuation of application No. PCT/JP2022/043906, filed on Nov. 29, 2022.
Claims priority of application No. 2022-013653 (JP), filed on Jan. 31, 2022.
Prior Publication US 2023/0349846 A1, Nov. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01N 23/18 (2018.01); G01N 23/04 (2018.01); G01N 23/083 (2018.01); G01N 23/20008 (2018.01); G01N 23/2206 (2018.01); G01N 23/223 (2006.01); G21K 7/00 (2006.01); H01J 35/18 (2006.01)
CPC G01N 23/18 (2013.01) [G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/20008 (2013.01); G01N 23/2206 (2013.01); G01N 23/223 (2013.01); G21K 7/00 (2013.01); H01J 35/186 (2019.05); G01N 2223/04 (2013.01); G01N 2223/052 (2013.01); G01N 2223/071 (2013.01); G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/20 (2013.01); G01N 2223/204 (2013.01); G01N 2223/32 (2013.01); G01N 2223/643 (2013.01); G01N 2223/652 (2013.01)] 23 Claims
OG exemplary drawing
 
1. An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, comprising:
an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and
an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface,
wherein the X-ray detector includes a long X-ray receiver.