US 12,241,845 B2
Method and setup for detecting surface haze of materials
Wei Gao, Fremont, CA (US); Yu Liu, Beijing (CN); Zhizhen Wang, Beijing (CN); and Haimiao Li, Beijing (CN)
Assigned to Beijing Tongmei Xtal Technology Co., Ltd., Beijing (CN)
Appl. No. 17/789,775
Filed by Beijing Tongmei Xtal Technology Co., Ltd., Beijing (CN)
PCT Filed Dec. 22, 2021, PCT No. PCT/CN2021/140282
§ 371(c)(1), (2) Date Jun. 28, 2022,
PCT Pub. No. WO2022/267401, PCT Pub. Date Dec. 29, 2022.
Claims priority of application No. 202110706036.1 (CN), filed on Jun. 24, 2021.
Prior Publication US 2023/0341336 A1, Oct. 26, 2023
Int. Cl. G01N 21/95 (2006.01)
CPC G01N 21/9501 (2013.01) 12 Claims
OG exemplary drawing
 
1. A method for detecting surface haze of materials, comprising the following steps:
optionally, preliminary inspection, which is conducted on materials, to identify the materials with no visible surface defects; and
surface haze inspection, to detect the surface haze of the materials;
wherein an optical filter module is configured in surface haze inspection setup to filter off the photoluminescence signal of the materials in the light path to the detector, so as to avoid the photoluminescence signal being detected by the detector.