| CPC G01N 21/718 (2013.01) [H04N 23/56 (2023.01); H04N 23/69 (2023.01); G01N 2201/06113 (2013.01)] | 16 Claims |
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1. A laser-induced breakdown spectroscope that performs component analysis of an analyte using laser induced breakdown spectroscopy, the laser-induced breakdown spectroscope comprising:
a placement stage on which an analyte is placed;
a coaxial illuminator;
a side illuminator;
a camera which receives reflection light reflected by the analyte placed on the placement stage and detects a light reception amount of the received reflection light;
a laser light emitter which emits laser light to the analyte;
a collection head which collects plasma light generated in the analyte as the analyte is irradiated with the laser light emitted from the laser light emitter;
a detector which receives the plasma light generated in the analyte and collected by the collection head, and generates an intensity distribution spectrum that is an intensity distribution of the plasma light for each wavelength; and
a processor which includes: an imaging controller that generates an image of the analyte based on the light reception amount of the reflection light detected by the camera; a component analysis section that receives a start trigger signal for starting component analysis of the analyte and performs the component analysis of the analyte based on the intensity distribution spectrum generated by the detector; a user interface controller that receives a specification of an analysis point; and an illumination setting section that sets an illumination condition, which includes a control parameter of the coaxial illuminator and a control parameter of the side illuminator,
wherein the processor
receives the specification of the analysis point having a coordinate,
receives the start trigger signal for starting component analysis after receiving the specification of the analysis point,
controls the camera to generate a pre-irradiation image that is the image corresponding to the analysis point having the coordinate before the analysis point of the analyte is irradiated with the laser light in response to the reception of the start trigger signal while at least one of the coaxial illuminator and the side illuminator are turned on,
stores the illumination condition, which includes the control parameter of the coaxial illuminator and the control parameter of the side illuminator, in a storage device,
turns off the coaxial illuminator and the side illuminator,
controls the laser light emitter after controlling the camera to emit the laser light to the analysis point of the analyte having the coordinate to occur destruction to the analysis point of the analyte while the coaxial illuminator and the side illuminator are turned off,
reads the illumination condition from the storage device, which includes the control parameter of the coaxial illuminator and the control parameter of the side illuminator,
turns on at least one of the coaxial illuminator and the side illuminator based on the control parameter of the coaxial illuminator and the control parameter of the side illuminator in the illumination condition,
controls the camera to generate a post-irradiation image that is the image corresponding to the analysis point having the coordinate after the analysis point of the analyte is irradiated with the laser light, which occurs after controlling the laser light emitter to emit the laser light to the analysis point of the analyte, and the analyte is destructed by the irradiation of the laser light while at least one of the coaxial illuminator and the side illuminator are turned on based on the control parameter of the coaxial illuminator and the control parameter of the side illuminator in the illumination condition,
associates the pre-irradiation image corresponding to the analysis point having the coordinate, the post-irradiation image corresponding to the analysis point having the coordinate, and a component analysis result corresponding to the analysis point having the coordinate based on the intensity distribution spectrum generated by emitting the laser light to the analysis point of the analyte and receiving the plasma light by the detector,
stores the component analysis result associated with the pre-irradiation image and the post-irradiation image to a non-volatile memory, the pre-irradiation image and the post-irradiation image corresponding to the analysis point having the coordinate,
reads the component analysis result, the pre-irradiation image and the post-irradiation image, the pre-irradiation image and the post-irradiation image being associated with the component analysis result corresponding to the analysis point having the coordinate, from the non-volatile memory, and
causes a display to display the pre-irradiation image and the post-irradiation image associated with the component analysis result read from the non-volatile memory when the component analysis result is displayed for collating the pre-irradiation image and the post-irradiation image to show the destruction occurring at the analysis point caused by the irradiation of the laser light.
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