US 12,241,837 B2
Apparatus for structured illumination microscopy, method for illuminating a sample and method of structured illumination microscopy
Joerg Siebenmorgen, Jena (DE); Ingo Kleppe, Jena (DE); and Ralf Netz, Jena (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Feb. 6, 2023, as Appl. No. 18/164,996.
Claims priority of application No. 10 2022 103 051.2 (DE), filed on Feb. 9, 2022.
Prior Publication US 2023/0266246 A1, Aug. 24, 2023
Int. Cl. G01N 21/64 (2006.01); G02B 21/06 (2006.01); G02B 21/16 (2006.01); G02B 21/36 (2006.01)
CPC G01N 21/6458 (2013.01) [G02B 21/06 (2013.01); G02B 21/16 (2013.01); G02B 21/361 (2013.01); G01N 2021/6463 (2013.01); G01N 2201/061 (2013.01)] 32 Claims
OG exemplary drawing
 
1. Apparatus for structured illumination microscopy, comprising
an illumination beam path for irradiating a sample with excitation light with a two-dimensional illumination pattern at angles greater than the angle for total internal reflection, the illumination beam path at least containing an illumination objective used to irradiate the sample,
a first separation device for separating the excitation light in a first linear coordinate direction in a pupil plane and
a displacement device for laterally displacing the illumination pattern in a sample plane,
having a detection beam path containing at least one microscope objective for guiding emission light to a camera, said emission light being emitted by the sample as a consequence of the irradiation by the excitation light,
a camera for recording images of the sample,
a control unit for calculating microscopic images of the sample (S) using partial images of the sample recorded for different positions of the illumination pattern in the sample plane, and
an adjustable second separation device for variably separating the excitation light in a second linear coordinate direction which is independent of the first linear coordinate direction, variable separation of the excitation light in said second linear coordinate direction being independent of the separation in the first linear coordinate direction in a pupil plane.