| CPC G01N 21/6402 (2013.01) [G01J 3/0232 (2013.01); G01J 3/4406 (2013.01); G01J 2003/064 (2013.01); G01J 3/2889 (2013.01); G01N 2021/6419 (2013.01); G01N 2021/6421 (2013.01); H01S 5/1092 (2013.01)] | 20 Claims |

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1. A system for inspecting a surface, comprising:
an optical system comprising at least one optical element, wherein the optical system receives light pulses and directs the light pulses to points along a scan line during a plurality of time intervals such that:
a wavelength of the light pulses directed to each point along the scan line varies from point to point within time intervals of the plurality of time intervals, and
over the plurality of time intervals, light having each wavelength of a plurality of wavelengths is directed to each point along the scan line; and
a gated camera configured to record a fluorescent response of the surface from the light having each wavelength of the plurality of wavelengths at each point along the scan line.
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