US 12,241,801 B2
Sensor device having first and second corrugated diaphragms for determining differential pressure in liquid or gaseous media
Andrew Holmes, Reading (GB)
Assigned to ABB Schweiz AG, Baden (CH)
Filed by ABB Schweiz AG, Baden (CH)
Filed on Jun. 17, 2022, as Appl. No. 17/843,406.
Claims priority of application No. 21180355 (EP), filed on Jun. 18, 2021.
Prior Publication US 2022/0404224 A1, Dec. 22, 2022
Int. Cl. G01L 13/02 (2006.01); G01L 19/14 (2006.01)
CPC G01L 13/026 (2013.01) [G01L 19/14 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A sensor device for determining differential pressure in liquid or gaseous media, comprising:
a housing frame for the sensor device, the housing frame including a first opening and a second opening;
a sensing element, the sensing element including a first side and a second side, the sensing element disposed within the housing frame to define a first cavity at its first side and a second cavity at its second side, wherein the sensing element is configured to determine a differential pressure between the first side and the second side;
a first corrugated diaphragm and a second corrugated diaphragm, the first corrugated diaphragm being configured to close the first opening to seal the first cavity of the housing frame, the second corrugated diaphragm being configured to close the second opening to seal the second cavity of the housing frame;
an inert hydraulic fluid disposed within the first cavity and the second cavity, the inert hydraulic fluid fluidly coupling an external pressure acting on the respective corrugated diaphragm to the respective side of the sensing element;
wherein the first corrugated diaphragm and the second corrugated diaphragm is built by a conformal coating process using a substrate with structured surface.