US 12,241,782 B2
Transportation method
Hiroki Oyama, Hamamatsu (JP); Katsumi Shibayama, Hamamatsu (JP); Takashi Kasahara, Hamamatsu (JP); Masaki Hirose, Hamamatsu (JP); Toshimitsu Kawai, Hamamatsu (JP); and Yumi Kuramoto, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Dec. 16, 2022, as Appl. No. 18/083,074.
Application 18/083,074 is a continuation of application No. 16/765,765, granted, now 11,592,332, previously published as PCT/JP2018/041729, filed on Nov. 9, 2018.
Claims priority of application No. 2017-225973 (JP), filed on Nov. 24, 2017.
Prior Publication US 2023/0118479 A1, Apr. 20, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); B65D 85/48 (2006.01); G01J 3/26 (2006.01); G02B 26/00 (2006.01); G02B 26/02 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC G01J 3/26 (2013.01) [B65D 85/48 (2013.01); G02B 26/00 (2013.01); G02B 26/02 (2013.01); H01L 21/673 (2013.01); H01L 21/67359 (2013.01); H01L 21/677 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method comprising a first step of accommodating the object in an accommodating container,
wherein each of the plurality of the Fabry-Perot interference filters includes a substrate, a first mirror portion and a second mirror portion provided on the substrate to face each other via a gap and in which a distance from each other is variable,
in the first step, the object is accommodated and supported in the accommodating container on a support body supported by at least one protrusion of the accommodating container in a state where the plurality of Fabry-Perot interference filters are two-dimensionally arranged and each of the Fabry-Perot interference filters is separated from a bottom surface of the accommodating container, and
a plurality of objects are stacked within the accommodating container.