US 12,241,772 B2
Flow metrology calibration for improved processing chamber matching in substrate processing systems
Evangelos T. Spyropoulos, San Jose, CA (US); and Piyush Agarwal, Newark, CA (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
Filed on Apr. 10, 2024, as Appl. No. 18/631,708.
Application 18/631,708 is a continuation of application No. 17/641,240, granted, now 11,959,793, previously published as PCT/US2020/050099, filed on Sep. 10, 2020.
Claims priority of provisional application 62/898,825, filed on Sep. 11, 2019.
Prior Publication US 2024/0255341 A1, Aug. 1, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01F 25/10 (2022.01); G01F 1/36 (2006.01); G01F 15/04 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC G01F 25/15 (2022.01) [G01F 1/36 (2013.01); G01F 15/043 (2013.01); H01J 37/32449 (2013.01); H01J 37/32091 (2013.01); H01J 2237/24585 (2013.01); H01L 21/67253 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A calibration system for an orifice-based flow metrology system, comprising:
a gas box including valves and mass flow controllers to selectively supply a first calibration gas:
a first metrology system including a first temperature sensor, a first pressure sensor and a first orifice having a first orifice size;
a reference metrology system including a second temperature sensor, a second pressure sensor and a second orifice having the first orifice size;
a controlled heating source configured to heat the first temperature sensor and the second temperature sensor;
a controller configured to:
a) cause the controlled heating source to heat the first temperature sensor and the second temperature sensor;
b) cause a first transfer function to be generated based on first and second temperatures sensed by the first and second temperature sensors, respectively;
c) cause the first calibration gas to be supplied and a second transfer function to be generated based on first and second pressures sensed by the first and second pressure sensors, respectively; and
d) cause temperature and pressure to be calibrated using the first transfer function and the second transfer function, respectively.