US 12,241,733 B2
Device and method for the measurement of inclination and angular stability of electromagnetic radiation beams, and for the measurement of a spatial shift of a focused electromagnetic radiation beam
Simone Cialdi, Monza e Brianza (IT); Daniele Ernesto Cipriani, Milan (IT); Stefano Capra, Varese (IT); François Mathieu, Draveil (FR); and Zeudi Mazzotta, Breukelen (NL)
Assigned to ECOLE POLYTECHNIQUE, Palaiseau (FR)
Appl. No. 17/775,181
Filed by UNIVERSITA' DEGLI STUDI DI MILANO, Milan (IT); CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris (FR); and ECOLE POLYTECHNIQUE, Palaiseau (FR)
PCT Filed Nov. 5, 2020, PCT No. PCT/IB2020/060419
§ 371(c)(1), (2) Date May 6, 2022,
PCT Pub. No. WO2021/090230, PCT Pub. Date May 14, 2021.
Claims priority of application No. 102019000020562 (IT), filed on Nov. 7, 2019.
Prior Publication US 2022/0390225 A1, Dec. 8, 2022
Int. Cl. G01B 11/27 (2006.01)
CPC G01B 11/27 (2013.01) 20 Claims
OG exemplary drawing
 
1. A device for measuring an angular inclination and angular inclination fluctuations of an electromagnetic radiation beam, the device being able to detect the incidence angular inclination and the fluctuations thereof with respect to a nominal beam propagation axis, in a desired detection plane comprising the nominal propagation axis, wherein the device comprises:
a first screen, comprising a first slit having a first slit dimension along a first direction on a detection plane transverse to the first slit, said first slit being adapted to determine, when crossed by the beam, a diffraction of the beam, so as to generate downstream of the first screen, a diffracted electromagnetic field having on said detection plane a diffraction pattern dependent on said incidence angular inclination of the beam;
a second screen, comprising a second slit having a second slit dimension along a second direction parallel to said first direction on said detection plane, said second slit being parallel to the first slit in a direction perpendicular to said first direction and second direction, and being arranged in a selection position on a scale defined on said second direction,
said second screen being arranged downstream of the first screen, with respect to the propagation of the beam, and being configured to shield the diffracted electromagnetic field with the exception of a transmitted portion of diffracted electromagnetic field passing through said second slit;
at least one first electromagnetic power and/or energy detector, arranged downstream of the second slit with respect to the propagation of the beam, and configured to detect the power and/or electromagnetic energy of said transmitted portion of diffracted electromagnetic field, dependent on said diffraction pattern;
said at least one first electromagnetic power and/or energy detector being configured to generate a first electrical signal, based on the detected electromagnetic power and/or energy, said first electric signal being representative of said incidence angular inclination of the beam in the detection plan.