US 12,241,594 B2
Constant headspace ampoule
David Marquardt, Scottsdale, AZ (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 30, 2022, as Appl. No. 17/898,608.
Prior Publication US 2024/0068619 A1, Feb. 29, 2024
Int. Cl. C23C 16/448 (2006.01); F17C 3/00 (2006.01)
CPC F17C 3/00 (2013.01) [F17C 2201/0119 (2013.01); F17C 2205/0311 (2013.01); F17C 2205/0329 (2013.01); F17C 2205/0391 (2013.01); F17C 2260/024 (2013.01); F17C 2270/0518 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An ampoule comprising:
a housing having a sidewall and a bottom;
a lid positioned on a top surface of the sidewall, the lid having an inlet opening and an outlet opening;
a floating structure within the housing, the floating structure comprising a float having a top surface and volume, the volume configured to displace a predetermined volume of liquid so that the top surface of the float remains a depth below a surface of the liquid, an outlet channel extending from a top surface of the float, a baffle having a top surface and a bottom surface defining a thickness of the baffle, the baffle positioned along a length of the outlet channel to create a saturation zone between the bottom surface of the baffle and the surface of the liquid, and at least one opening in the outlet channel between the top surface of the float and the bottom surface of the baffle.