US 12,240,760 B2
Aligned carbon nanotubes
Suvi Haukka, Helsinki (FI)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on May 29, 2019, as Appl. No. 16/424,828.
Application 16/424,828 is a continuation of application No. 15/074,813, filed on Mar. 18, 2016, granted, now 10,343,920.
Prior Publication US 2019/0375638 A1, Dec. 12, 2019
Int. Cl. C23C 16/26 (2006.01); B32B 3/10 (2006.01); C01B 32/158 (2017.01); C01B 32/162 (2017.01); C23C 16/02 (2006.01)
CPC C01B 32/162 (2017.08) [B32B 3/10 (2013.01); C01B 32/158 (2017.08); C23C 16/0209 (2013.01); C23C 16/0227 (2013.01); C23C 16/0281 (2013.01); C23C 16/26 (2013.01); Y10T 428/24802 (2015.01)] 18 Claims
OG exemplary drawing
 
14. A method, comprising:
forming patterned features on a surface of a substrate by depositing material, patterning the material, and etching the material to form the patterned features;
disposing a polymeric material comprising a block copolymer onto a surface of a substrate between the patterned features;
annealing the polymeric material to form aligned phases of the polymeric material between the patterned features;
removing portions of the polymeric material to form exposed substrate sections on the surface of the substrate corresponding to the aligned phases;
selectively forming catalyst material only on the exposed substrate sections by selectively decomposing one or more metal-containing precursors including the catalyst material on the exposed substrate surface sections, compared to the patterned polymeric material and exposing the catalyst material to a reducing environment;
forming nanoparticles comprising the catalyst material;
providing a carbon-containing compound to a reaction space; and
decomposing the carbon-containing compound on the catalyst material to form one or more carbon nanotubes,
wherein the one or more carbon nanotubes form a channel between a source and a drain of a device; and
wherein the method further comprising, after forming the nanoparticles, performing an oxidation step followed by a reducing step.