	US 12,240,752 B2
	Method for producing a sequencing unit for sequencing a biochemical material and sequencing unit
Franz Laermer, Weil Der Stadt (DE)
Assigned to Robert Bosch GmbH, Stuttgart (DE)
Appl. No. 17/051,362
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed May 2, 2019, PCT No. PCT/EP2019/061249 § 371(c)(1), (2) Date Oct. 28, 2020, PCT Pub. No. WO2019/215006, PCT Pub. Date Nov. 14, 2019.
Claims priority of application No. 10 2018 207 099.7 (DE), filed on May 8, 2018.
Prior Publication US 2021/0229982 A1, Jul. 29, 2021
Int. Cl. B81C 1/00 (2006.01); B81B 1/00 (2006.01); G01N 33/487 (2006.01)

CPC B81C 1/00087 (2013.01) [B81B 1/004 (2013.01); G01N 33/48721 (2013.01); B81B 2201/0214 (2013.01); B81B 2203/0353 (2013.01); B81C 2201/0149 (2013.01)]

16 Claims

1. A method for producing a sequencing unit for sequencing a biochemical material, the method comprising:

providing a graphene precursor layer;

forming at least one pore in the graphene precursor layer using thermal lithography;

thermally converting the graphene precursor layer with the at least one pore into a graphene layer by controlled heating of the graphene precursor layer to a selected conversion temperature using controlled annealing, thereby configuring the at least one pore as an at least one sequencing pore for sequencing the biochemical material;

arranging a respective electrode at a respective opening of the at least one pore; and

covering the graphene layer with a counter electrode.