US 12,240,701 B2
Apparatus for transporting container and system for storing container with the apparatus
Jun Sang Ahn, Gyeonggi-do (KR); Sun Oh Kim, Gyeonggi-do (KR); and Chan Young Noh, Seoul (KR)
Assigned to SEMES Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES Co., Ltd., Chungcheongnam-do (KR)
Filed on Sep. 14, 2021, as Appl. No. 17/474,285.
Claims priority of application No. 10-2020-0147013 (KR), filed on Nov. 5, 2020.
Prior Publication US 2022/0135332 A1, May 5, 2022
Int. Cl. B65G 1/137 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC B65G 1/1375 (2013.01) [H01L 21/67353 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); H01L 21/67763 (2013.01); H01L 21/67769 (2013.01); B65G 2201/0235 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A system for storing a container comprising:
a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container;
a second storage unit installed on a side of the first storage unit and for storing the container; and
a transporting unit moving between the first storage unit and the second storage unit and for transporting the container stored in the first storage unit to the second storage unit,
wherein an upper portion of a space, in which a semiconductor manufacturing facility is built, includes a first area and at least one second area arranged outside the first area, and
wherein the second storage unit is installed in the second area.
 
13. A system for storing a container comprising:
a first storage unit installed on a side of a movement path of a transporting device for transporting a container accommodating a substrate and for storing the container;
a second storage unit installed on a side of the first storage unit and for storing the container; and
a transporting unit moving between the first storage unit and the second storage unit, and for transporting the container stored in the first storage unit to the second storage unit,
wherein at least one unit of a plurality of first storage units is an interface unit, and
wherein the transporting unit transports the container to the second storage unit when the container is stored in the interface unit.
 
14. An apparatus for transporting a container moving between a first storage unit installed on a side of a movement path of a transporting device and a second storage unit installed on a side of the first storage unit,
wherein the apparatus comprising:
a driving wheel rotating along a rail;
a driving control unit coupled to the driving wheel on its both sides and for controlling the driving wheel; and
a body unit coupled to a lower portion of the driving control unit and including a gripping unit for gripping the container, a first moving control unit for moving the gripping unit in upward and downward directions, and a second moving control unit for moving the gripping unit in a lateral direction,
wherein the container stored in the first storage unit is transported to the second storage unit using a stroke of the second moving control unit, and
wherein the transporting unit comprises,
a driving wheel that rotates along a rail;
a driving control unit coupled to the driving wheel on its both sides and for controlling the driving wheel; and
a body unit coupled to a lower portion of the driving control unit and including a gripping unit for gripping the container, a first moving control unit for moving the gripping unit in upward and downward directions, and a second moving control unit for moving the gripping unit in a lateral direction, and
wherein the second moving control unit comprises,
a plate structure elongated in the lateral direction; and
a first sliding member installed to be movable in the lateral direction on the plate structure.