CPC B65G 1/137 (2013.01) [B25J 13/089 (2013.01)] | 19 Claims |
1. A semiconductor manufacturing article storage device comprising:
a load port configured to load and unload a plurality of articles;
a plurality of shelves configured to load the articles;
a transportation robot configured to transport the articles between the load port and the shelves or between the shelves;
a receiving part configured to receive operation commands of the transportation robot from an upper system;
a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands; and
a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands
wherein the calculating part checks a basic setting value with respect to an order of priority on the operation commands, which is predetermined by the upper system, and calculates a time setting value based on a time for transmitting the operation commands from the upper system, and sums the basic setting value and the time setting value.
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