US 12,240,078 B2
Cleaning system for polishing liquid delivery arm
Roy C. Nangoy, Santa Clara, CA (US); Shantanu Rajiv Gadgil, Santa Clara, CA (US); Nathan Arron Davis, Gilbert, AZ (US); Allen L. D'Ambra, Burlingame, CA (US); Michael J. Coughlin, Livermore, CA (US); and Sumit Subhash Patankar, Fremont, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 10, 2021, as Appl. No. 17/344,617.
Claims priority of provisional application 63/043,665, filed on Jun. 24, 2020.
Prior Publication US 2021/0402565 A1, Dec. 30, 2021
Int. Cl. B24B 57/02 (2006.01); B24B 37/34 (2012.01); B24B 53/017 (2012.01)
CPC B24B 57/02 (2013.01) [B24B 37/34 (2013.01); B24B 53/017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A polishing assembly comprising:
a rotatable platen to support a polishing pad;
a polishing liquid delivery arm having an enclosure open at a bottom thereof and one or more ports to deliver a polishing liquid and a cleaning fluid downwardly through an interior space of the enclosure onto the polishing pad; and
a delivery arm cleaning tool removably attached to the polishing liquid delivery arm, the cleaning tool extending below the delivery arm and having a delivery arm-facing surface shaped such that the cleaning tool directs the cleaning fluid from the polishing liquid delivery arm on to an inner surface of the enclosure of the polishing liquid delivery arm to clean the inner surface of the enclosure or the one or more ports.