US 11,916,540 B2
Transversely-excited film bulk acoustic resonator with periodic etched holes
Ventsislav Yantchev, Sofia (BG)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 23, 2022, as Appl. No. 17/702,549.
Application 17/702,549 is a continuation of application No. 16/930,534, filed on Jul. 16, 2020, granted, now 11,323,096.
Application 16/930,534 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/874,709, filed on Jul. 16, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2022/0216855 A1, Jul. 7, 2022
Int. Cl. H03H 9/56 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H10N 30/87 (2023.01)
CPC H03H 9/568 (2013.01) [H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 3/02 (2013.01); H03H 9/02039 (2013.01); H03H 2003/023 (2013.01); H10N 30/877 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator, comprising:
a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate;
a conductor pattern formed on the front surface, the conductor pattern comprising an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm; and
a periodic array of holes in the diaphragm at the ends of alternate interleaved fingers.