US 11,916,537 B2
Electroacoustic device with conductive acoustic mirrors
Joachim Klett, Grafing bei München (DE); and Thomas Mittermaier, Bavaria (DE)
Assigned to RF360 Singapore Pte. Ltd., Singapore (SG)
Filed by RF360 SINGAPORE PTE. LTD., Singapore (SG)
Filed on Aug. 27, 2021, as Appl. No. 17/459,325.
Claims priority of provisional application 63/106,727, filed on Oct. 28, 2020.
Prior Publication US 2022/0131523 A1, Apr. 28, 2022
Int. Cl. H03H 9/17 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01); H03H 3/02 (2006.01)
CPC H03H 9/17 (2013.01) [H03H 3/02 (2013.01); H03H 9/13 (2013.01); H03H 9/568 (2013.01); H03H 2003/025 (2013.01)] 27 Claims
OG exemplary drawing
 
1. An electroacoustic device, comprising:
a substrate;
a bottom electrode layer disposed above the substrate;
an acoustic mirror stack having:
a first dielectric layer disposed above the bottom electrode layer; and
a first conductive layer disposed above the first dielectric layer;
a piezoelectric layer disposed above the acoustic mirror stack; and
one or more first vias disposed between the bottom electrode layer and the first conductive layer, the one or more first vias electrically coupling the bottom electrode layer and the first conductive layer.