US 11,916,094 B2
Photoelectric conversion panel and method for manufacturing photoelectric conversion panel
Hiroyuki Moriwaki, Kameyama (JP); Makoto Nakazawa, Kameyama (JP); Tetsuya Tanishima, Kameyama (JP); and Rikiya Takita, Kameyama (JP)
Assigned to Sharp Display Technology Corporation, Kameyama (JP)
Filed by Sharp Display Technology Corporation, Kameyama (JP)
Filed on Aug. 2, 2021, as Appl. No. 17/391,747.
Prior Publication US 2023/0030238 A1, Feb. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14663 (2013.01) [H01L 27/14612 (2013.01); H01L 27/14689 (2013.01); H01L 27/14692 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A photoelectric conversion panel comprising:
a thin film transistor;
a first organic film formed above the thin film transistor;
a photodiode formed above the first organic film; and
a first inorganic insulating film formed to cover at least a part of the first organic film,
wherein the first inorganic insulating film has a through hole that exposes a part of the first organic film.