CPC H01L 21/6773 (2013.01) [B23Q 15/00 (2013.01); B23Q 16/00 (2013.01); G05D 5/04 (2013.01); H01L 21/67736 (2013.01); H01L 21/67778 (2013.01); H01L 23/04 (2013.01)] | 20 Claims |
1. A load port, comprising:
a housing;
one or more elevators;
a stage moveable within the housing by the one or more elevators,
wherein the stage includes a mechanism to support multiple types of die containers,
wherein the stage includes:
a first portion movable by the one or more elevators to accommodate a first die container type of the multiple types of die containers, and
a second portion movable by the one or more elevators to accommodate a second die container type of the multiple types of die containers,
wherein the first die container type and the second die container type have different outer dimensions; and
a position sensor configured to identify a type of a die container positioned on the stage.
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