CPC H01L 21/67271 (2013.01) [B07C 5/3412 (2013.01); G01R 31/01 (2013.01); H01L 21/67703 (2013.01)] | 20 Claims |
1. A die sorter tool, comprising:
a first lane to receive, from one or more load ports, a carrier with a set of dies;
a die flip module to:
receive the carrier,
manipulate one or more dies of the set of dies, and
return the one or more dies to the carrier after manipulating the one or more dies; and
a second lane to:
receive the carrier from the die flip module, and
provide the carrier to the one or more load ports.
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