| CPC H01L 21/67051 (2013.01) [B01D 46/0041 (2013.01); B08B 15/02 (2013.01); H01L 21/67178 (2013.01); H01L 21/6719 (2013.01); H01L 21/304 (2013.01); H01L 21/67017 (2013.01)] | 12 Claims |
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1. A substrate processing apparatus, comprising:
a plurality of processing parts arrayed in an up-and-down direction, each of which is capable of supplying a plurality of kinds of processing fluids to a substrate;
a plurality of exhaust pipes extending upward from said plurality of processing parts, into which exhaust gases from said plurality of processing parts flow, respectively, each of said plurality of exhaust pipes having an upper end portion and a lower end portion;
two or more collecting pipes arranged above said plurality of processing parts, said two or more collecting pipes corresponding to two or more fluid classifications, respectively, into which said plurality of kinds of processing fluids are classified;
a plurality of flow path switching parts which are provided at the upper end portions of said plurality of exhaust pipes respectively, each of said plurality of flow path switching parts connecting said upper end portion to said two or more collecting pipes and switching a flow path of exhaust gas flowing in said exhaust pipe, among said two or more collecting pipes; and
a control part for controlling said plurality of flow path switching parts in accordance with the processing fluids used in said plurality of processing parts, wherein
each exhaust pipe comprises:
a first exhaust path extending upward from a processing part; and
a second exhaust path having a portion extending from an upper end of said first exhaust path toward a direction substantially perpendicular to said up-and-down direction and being connected to a flow path switching part,
respective upper ends of a plurality of first exhaust paths in said plurality of exhaust pipes are disposed approximate to one another,
respective lengths of said plurality of first exhaust paths are different from one another,
respective lengths of a plurality of second exhaust paths in said plurality of exhaust pipes are different from one another, and
in each combination of two exhaust pipes included in said plurality of exhaust pipes, the length of said first exhaust path in one exhaust pipe is longer than that of said first exhaust path in the other exhaust pipe and the length of said second exhaust path in said one exhaust pipe is shorter than that of said second exhaust path in said other exhaust pipe.
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