US 11,915,907 B2
Method for operating a particle beam microscope
Dirk Preikszas, Oberkochen (DE); and Simon Diemer, Lauchheim (DE)
Assigned to Carl Zeiss Microscopy GmbH, Jena (DE)
Filed by Carl Zeiss Microscopy GmbH, Jena (DE)
Filed on Feb. 1, 2022, as Appl. No. 17/590,148.
Claims priority of application No. 102021102328.9 (DE), filed on Feb. 2, 2021.
Prior Publication US 2022/0246389 A1, Aug. 4, 2022
Int. Cl. H01J 37/21 (2006.01); H01J 37/28 (2006.01); H01J 37/12 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/21 (2013.01) [H01J 37/12 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/04735 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of using a particle beam microscopy system comprising a particle beam source for generating a particle beam, an objective lens for focusing the particle beam on an object and a first deflection device for scanning the particle beam over the object, the particle beam microscopy system being configured to record particle-microscopic images by virtue of using the first deflection device to scan the particle beam over the object, the method comprising:
recording a first particle-microscopic image at a first focus and varying the excitations of the first deflection device within a first range;
changing from the first focus to a second focus;
determining a second range of excitations of the first deflection device on the basis of the first range, the first focus, the second focus and a machine parameter determined in advance; and
recording a second particle-microscopic image at the second focus and varying the excitations of the first deflection device within the second range,
wherein the second range of excitations is determined so that a region of the object represented in the second particle-microscopic image is also represented in the first particle-microscopic image.