US 11,913,896 B2
Humidity sensor and RFID tag including the same
Hiroshi Shiraki, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Dec. 17, 2020, as Appl. No. 17/125,552.
Application 17/125,552 is a continuation of application No. PCT/JP2019/024984, filed on Jun. 24, 2019.
Claims priority of application No. 2018-127523 (JP), filed on Jul. 4, 2018.
Prior Publication US 2021/0109053 A1, Apr. 15, 2021
Int. Cl. G01N 27/22 (2006.01); G01N 27/12 (2006.01); G06K 19/077 (2006.01)
CPC G01N 27/223 (2013.01) [G01N 27/121 (2013.01); G01N 27/122 (2013.01); G01N 27/228 (2013.01); G06K 19/07773 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A humidity sensor comprising:
a first electrode electrically connected to a first terminal; and
a moisture-sensitive member having a dielectric constant configured to change in accordance with humidity, wherein the first electrode includes a first internal electrode unit configured in a meandering shape including a first main surface covered with the moisture-sensitive member, and a second main surface covered with the moisture-sensitive member; and
a second electrode electrically connected to a second terminal;
wherein the first electrode is disposed on a first plane inside the moisture-sensitive member, and the second electrode is disposed on a second plane inside the moisture-sensitive member, the second plane parallel to the first plane, and the second plane located above the first plane when viewed in a plan view.