US 11,913,842 B2
Temperature sensor and temperature measurement apparatus
Koichi Nagai, Kyoto (JP); and Naofumi Hino, Osaka (JP)
Assigned to PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD., Osaka (JP)
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Filed on May 22, 2022, as Appl. No. 17/664,421.
Claims priority of application No. 2021-093016 (JP), filed on Jun. 2, 2021.
Prior Publication US 2022/0390293 A1, Dec. 8, 2022
Int. Cl. G01K 11/26 (2006.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01)
CPC G01K 11/265 (2013.01) [H10N 30/87 (2023.02); H10N 30/88 (2023.02)] 9 Claims
OG exemplary drawing
 
1. A temperature sensor comprising:
a first piezoelectric substrate that propagates a first surface acoustic wave;
a first comb-shaped electrode on the first piezoelectric substrate;
a first temperature detection reflector on a same surface of the first piezoelectric substrate as the first comb-shaped electrode and at a position opposing the first comb-shaped electrode;
a second piezoelectric substrate that propagates a second surface acoustic wave;
a second comb-shaped electrode on the second piezoelectric substrate;
a second temperature detection reflector on a same surface of the second piezoelectric substrate as the second comb-shaped electrode and at a position opposing the second comb-shaped electrode; and
a piezoelectric body that is joined to a back surface of the second piezoelectric substrate opposite to a surface of the second piezoelectric substrate on which the second surface acoustic wave propagates, the piezoelectric body being configured to be deformed by an electromotive force of a thermocouple to change a path length of a propagation path of the second surface acoustic wave on the second piezoelectric substrate with respect to a path length before deformation by the electromotive force.