CPC G01K 11/265 (2013.01) [H10N 30/87 (2023.02); H10N 30/88 (2023.02)] | 9 Claims |
1. A temperature sensor comprising:
a first piezoelectric substrate that propagates a first surface acoustic wave;
a first comb-shaped electrode on the first piezoelectric substrate;
a first temperature detection reflector on a same surface of the first piezoelectric substrate as the first comb-shaped electrode and at a position opposing the first comb-shaped electrode;
a second piezoelectric substrate that propagates a second surface acoustic wave;
a second comb-shaped electrode on the second piezoelectric substrate;
a second temperature detection reflector on a same surface of the second piezoelectric substrate as the second comb-shaped electrode and at a position opposing the second comb-shaped electrode; and
a piezoelectric body that is joined to a back surface of the second piezoelectric substrate opposite to a surface of the second piezoelectric substrate on which the second surface acoustic wave propagates, the piezoelectric body being configured to be deformed by an electromotive force of a thermocouple to change a path length of a propagation path of the second surface acoustic wave on the second piezoelectric substrate with respect to a path length before deformation by the electromotive force.
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