US 11,913,108 B2
Method and device for homogeneously coating 3D substrates
Sven Häberlein, Ottendorf-Okrilla (DE); Andreas Vogt, Dresden (DE); and Roland Maudrich, Moritzburg (DE)
Assigned to FHR ANLAGENBAU GMBH, Ottendorf-Okrilla (DE)
Filed by FHR ANLAGENBAU GMBH, Ottendorf-Okrilla (DE)
Filed on Feb. 25, 2021, as Appl. No. 17/185,397.
Application 17/185,397 is a division of application No. 16/129,039, filed on Sep. 12, 2018, abandoned.
Claims priority of application No. 102017121327.9 (DE), filed on Sep. 14, 2017.
Prior Publication US 2021/0207260 A1, Jul. 8, 2021
Int. Cl. C23C 14/34 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01); C23C 14/50 (2006.01)
CPC C23C 14/3492 (2013.01) [C23C 14/3407 (2013.01); C23C 14/50 (2013.01); C23C 14/54 (2013.01); C23C 14/542 (2013.01); C23C 14/56 (2013.01); H01J 37/32403 (2013.01); H01J 37/3417 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A device for homogeneously coating surfaces of 3D substrates in a vacuum chamber, the device comprising:
an elongated sputtering source having one end and another end, the elongated sputtering source being fastened at the one end to a source connection adapter and at the other end to a counter-bearing, the counter-bearing being supported, via a counter-bearing receptable, by the source connection adapter;
a tube connection connected to the source connection adapter;
a doubly-angled pivoting tube, wherein the tube connection connects the source connection adapter to one end of the doubly-angled pivoting tube;
a pivoting tube drive coupled to another end of the doubly-angled pivoting tube and forming a virtual axis of rotation D about which the doubly-angled pivoting tube is able to be pivoted, the virtual axis of rotation extending longitudinally through the elongated sputtering source;
a pivoting-motor/gearing unit coupled to the pivoting tube drive;
a displacement tube, the pivoting-motor/gearing unit being arranged at one end of the displacement tube, and another end of the displacement tube being coupled to an inner chamber wall of the vacuum chamber as a fixed point;
wherein pivoting of the doubly-angled pivoting tube about the virtual axis of rotation D results in rotation of the sputtering source about the same axis of rotation, without causing a change in spatial position in relation to a 3D substrate, the 3D substrate being able to be moved past the elongated sputtering source in a translational manner at a defined spacing for coating of the 3D substrate, the 3D substrate having a curved substrate surface to be coated that is directed towards the elongated sputtering source; and
wherein the elongated sputtering source can be steplessly pivoted in a predefined angle range to set a predefined inclination angle and to be continuously set in operation at a desired spacing to the inner chamber wall or a desired spacing to the 3D substrate to be coated.