US 11,912,607 B2
Raw material supply device for production of glass fine particle deposits and raw material supply method
Tomomi Moriya, Osaka (JP)
Assigned to SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka (JP)
Appl. No. 17/297,124
Filed by SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka (JP)
PCT Filed Dec. 4, 2019, PCT No. PCT/JP2019/047456
§ 371(c)(1), (2) Date May 26, 2021,
PCT Pub. No. WO2020/116522, PCT Pub. Date Jun. 11, 2020.
Claims priority of application No. 2018-227116 (JP), filed on Dec. 4, 2018.
Prior Publication US 2022/0024801 A1, Jan. 27, 2022
Int. Cl. C03B 37/014 (2006.01); C03B 20/00 (2006.01); C03B 37/085 (2006.01)
CPC C03B 37/01413 (2013.01) [C03B 20/00 (2013.01); C03B 37/085 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A raw material supply device that supplies a raw material for manufacturing a glass particle deposited body to a burner, the device comprising:
a liquid raw material tank;
a liquid raw material pipe with one end connected to the liquid raw material tank;
a liquid raw material pressure feed pump that pressure-feeds a liquid raw material from the liquid raw material tank to a liquid mass flow controller (MFC) via the liquid raw material pipe;
a pressure adjustment valve that is provided on a secondary side of the liquid raw material pressure feed pump in the liquid raw material pipe;
the liquid MFC that is provided on the secondary side of the liquid raw material pressure feed pump, and connected to another end of the liquid raw material pipe; and
a vaporizer that is connected to a secondary side of the liquid MFC, and vaporizes the liquid raw material,
wherein the liquid raw material is siloxane,
a pipe on a secondary side of the pressure adjustment valve is connected to a location with a pressure lower than a pressure on a primary side thereof, and
an opening degree of the pressure adjustment valve is configured to be adjusted according to a change in pressure on the primary side of the pressure adjustment valve.