US 11,911,806 B2
Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium
Masumi Nishijima, Tokyo (JP); Kunimasa Matsushita, Tokyo (JP); and Hiroshi Ishikawa, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Feb. 14, 2022, as Appl. No. 17/670,522.
Claims priority of application No. 2021-021534 (JP), filed on Feb. 15, 2021.
Prior Publication US 2022/0258217 A1, Aug. 18, 2022
Int. Cl. B08B 1/04 (2006.01); B08B 1/00 (2006.01); B08B 13/00 (2006.01); G01M 1/22 (2006.01)
CPC B08B 13/00 (2013.01) [B08B 1/002 (2013.01); B08B 1/04 (2013.01); G01M 1/22 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A substrate cleaning device, comprising:
a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner;
a rotation device which makes the roll cleaning member attached to the holder rotate;
a sensor which measures information concerning a vibration of the roll cleaning member during rotation; and
a control device which determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.