US 12,238,935 B1
Embedded memory adjacent to non-memory
Noriyuki Sato, Palo Alto, CA (US); Tanay Gosavi, Portland, OR (US); Niloy Mukherjee, San Ramos, CA (US); Rajeev Kumar Dokania, Beaverton, OR (US); Amrita Mathuriya, Portland, OR (US); and Sasikanth Manipatruni, Portland, OR (US)
Assigned to Kepler Computing Inc., San Francisco, CA (US)
Filed by Kepler Computing Inc., San Francisco, CA (US)
Filed on Jul. 27, 2023, as Appl. No. 18/360,764.
Application 18/360,764 is a continuation of application No. 17/345,964, filed on Jun. 11, 2021, granted, now 11,765,909.
This patent is subject to a terminal disclaimer.
Int. Cl. H10B 53/40 (2023.01)
CPC H10B 53/40 (2023.02) 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a first pedestal;
a second pedestal;
an etch stop layer, wherein the first pedestal is separated by the second pedestal by the etch stop layer;
a first memory device comprising a first stack of materials, wherein a first portion of the first stack of materials is on the first pedestal;
a second memory device comprising a second stack of materials, wherein a second portion of the second stack of materials is on the second pedestal;
a first hard mask layer on the first memory device;
a second hard mask layer on the first memory device, wherein the first hard mask layer and the second hard mask layer are separated by a first metal via;
a first protection layer on the first hard mask layer;
a second protection layer on the second hard mask layer, wherein the first protection layer and the second protection layer are separated by the first metal via;
a third hard mask layer on the second memory device;
a fourth hard mask layer on the second memory device, wherein the third hard mask layer and the fourth hard mask layer are separated by a second metal via;
a third protection layer on the third hard mask layer;
a fourth protection layer on the fourth hard mask layer, wherein the third protection layer and the fourth protection layer are separated by the second metal via; and
an encapsulation material between the first memory device, the second memory device, the second hard mask layer, the second protection layer; the third hard mask layer, and the third protection layer, wherein the encapsulation material is on the etch stop layer and separates an interlayer dielectric from the etch stop layer.