US 12,238,927 B2
Semiconductor memory device and manufacturing method thereof
Nam Jae Lee, Cheongju-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si (KR)
Filed on Jul. 7, 2022, as Appl. No. 17/859,274.
Application 17/859,274 is a division of application No. 16/811,739, filed on Mar. 6, 2020, granted, now 11,417,672.
Claims priority of application No. 10-2019-0103297 (KR), filed on Aug. 22, 2019.
Prior Publication US 2022/0344363 A1, Oct. 27, 2022
Int. Cl. H01L 21/00 (2006.01); H10B 12/00 (2023.01); H10B 41/27 (2023.01); H10B 10/00 (2023.01)
CPC H10B 41/27 (2023.02) [H10B 12/0335 (2023.02); H10B 10/18 (2023.02)] 9 Claims
OG exemplary drawing
 
1. A semiconductor memory device comprising:
a common source line;
a bit line spaced apart from the common source line in a vertical direction;
a gate stack structure including interlayer insulating layers and conductive patterns, and including a hole, wherein the interlayer insulating layers and the conductive patterns are alternately stacked between the common source line and the bit line, and wherein the hole has a tapered shape that becomes narrower near the bit line and wider near the common source line;
a memory layer formed along the hole; and
a channel structure disposed on the memory layer, the channel structure being connected to the common source line and the bit line.