| CPC H05K 13/0061 (2013.01) [G03F 7/70991 (2013.01)] | 10 Claims |
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1. A temporary storage and reflow frame substrate system, for forming a circuit pattern on a substrate, the temporary storage and reflow frame substrate system comprising:
a substrate frame, configured for loading the substrate;
a substrate loading and unloading station, including a robotic arm, a feeding and discharging unit and a returning unit, the substrate frame is configured for connecting to the feeding and discharging unit and the returning unit, the robotic arm is configured to place the substrate into or remove the substrate from the substrate frame;
a first conveying unit, connected to the feeding and discharging unit and is configured for conveying the substrate frame, so that the substrate loaded on the substrate frame is developed and cleaned during the conveying process; and
a second conveying unit, connected between the first conveying unit and the returning unit, the second conveying unit is configured to convey the substrate frame, so that the substrate loaded on the substrate frame returns to the substrate loading and unloading station after the completion of the process, in order to be taken down from the substrate frame by the robotic arm,
wherein the substrate frame comprises a support structure, the support structure includes a back plate, a plurality of support beams and a plurality of support columns, the support beams are bridged to two sides of the substrate frame, the back plate is used to abut against the substrate and is opposed to the support beams, the support columns are connected between the support beams and the back plate.
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