US 12,238,849 B2
Radical generation device and ion spectrometer
Masaji Furuta, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 18/026,245
Filed by SHIMADZU CORPORATION, Kyoto (JP)
PCT Filed Apr. 26, 2021, PCT No. PCT/JP2021/016638
§ 371(c)(1), (2) Date Mar. 14, 2023,
PCT Pub. No. WO2022/059247, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 2020-154317 (JP), filed on Sep. 15, 2020.
Prior Publication US 2023/0363076 A1, Nov. 9, 2023
Int. Cl. H05H 1/30 (2006.01); G01N 27/623 (2021.01); H01J 49/26 (2006.01)
CPC H05H 1/30 (2013.01) [G01N 27/623 (2021.01); H01J 49/26 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A radical generation device comprising:
a cylindrical tube made of a dielectric material and having an inside into which a plasma raw material is introduced;
an antenna made of a conductor material and wound around the cylindrical tube;
an outer conductor part having an inside into which the cylindrical tube is inserted, and having a conductive inner peripheral surface being coaxial with the cylindrical tube and having a cross section which is concentric circular; and
a connection part which is a cylindrical shape body inserted into a gap between the inner peripheral surface of the outer conductor part and an outer peripheral surface of the cylindrical tube, and is in contact with the inner peripheral surface of the outer conductor part together with the antenna to electrically connect the outer conductor part and the antenna; wherein
the connection part has a double cylindrical tube structure including an inner cylindrical body and an outer cylindrical body, end portions of the inner cylindrical body and the outer cylindrical body on a same side are divided in a circumferential direction notches extending in an axial direction to form a plurality of divided pieces, and tapered portions swelling outward toward a tip end are formed on an outer side of the divided pieces of the inner cylindrical body or tapered portions swelling inward toward a tip end are formed on an inner side of the divided pieces of the outer cylindrical body.