Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
Bryant Garcia, Mississauga (CA); Ventsislav Yantchev, Sofia (BG); Patrick Turner, San Bruno, CA (US); Viktor Plesski, Gorgier (CH); Julius Koskela, Helsinki (FI); Soumya Yandrapalli, Lausanne (CH); Neal Fenzi, Santa Barbara, CA (US); and Robert B. Hammond, Santa Barbara, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Dec. 23, 2021, as Appl. No. 17/560,889.
Application 17/560,889 is a continuation in part of application No. 17/022,042, filed on Sep. 15, 2020, granted, now 11,323,090.
Application 17/022,042 is a continuation in part of application No. 16/829,617, filed on Mar. 25, 2020, granted, now 10,868,512, issued on Dec. 15, 2020.
Application 16/829,617 is a continuation of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 17/022,042 is a continuation in part of application No. 16/782,971, filed on Feb. 5, 2020, granted, now 10,790,802, issued on Sep. 29, 2020.
Application 16/782,971 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/782,971 is a continuation in part of application No. 16/438,141, filed on Jun. 11, 2019, granted, now 10,601,392, issued on Mar. 24, 2020.
Application 16/689,707 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/560,889 is a continuation in part of application No. 17/351,204, filed on Jun. 17, 2021, granted, now 11,929,727.
Application 17/351,204 is a continuation of application No. 17/030,066, filed on Sep. 23, 2020, granted, now 11,146,232.
Application 17/030,066 is a continuation in part of application No. 16/920,173, filed on Jul. 2, 2020, granted, now 11,139,794, issued on Oct. 5, 2021.
Application 16/920,173 is a continuation of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/560,889 is a continuation in part of application No. 17/169,155, filed on Feb. 5, 2021, granted, now 11,996,827.
Application 17/169,155 is a continuation in part of application No. 16/930,534, filed on Jul. 16, 2020, granted, now 11,323,096.
Application 16/930,534 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/560,889 is a continuation in part of application No. 16/989,710, filed on Aug. 10, 2020, granted, now 11,323,089.
Application 16/989,710 is a continuation in part of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/560,889 is a continuation in part of application No. 17/115,765, filed on Dec. 8, 2020, granted, now 11,996,826.
Application 17/115,765 is a continuation of application No. 16/933,224, filed on Jul. 20, 2020, granted, now 10,911,023, issued on Feb. 2, 2021.
Application 17/560,889 is a continuation in part of application No. 17/217,923, filed on Mar. 30, 2021, granted, now 11,936,358.
Application 17/560,889 is a continuation in part of application No. 17/229,767, filed on Apr. 13, 2021, granted, now 12,040,779.
Application 17/560,889 is a continuation in part of application No. 17/460,737, filed on Aug. 30, 2021, granted, now 12,009,804.
Application 17/217,923 is a continuation of application No. 16/805,471, filed on Feb. 28, 2020, granted, now 11,206,009.
Application 17/560,889 is a continuation in part of application No. 17/388,745, filed on Jul. 29, 2021, granted, now 12,088,281.
Application 17/560,889 is a continuation in part of application No. 17/122,977, filed on Dec. 15, 2020, granted, now 11,509,279.
Claims priority of provisional application 63/026,824, filed on May 19, 2020.
Claims priority of provisional application 62/904,133, filed on Sep. 23, 2019.
Claims priority of provisional application 62/818,564, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,809, filed on Oct. 31, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/904,386, filed on Sep. 23, 2019.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 63/081,169, filed on Sep. 21, 2020.
Claims priority of provisional application 62/874,709, filed on Jul. 16, 2019.
Claims priority of provisional application 62/951,452, filed on Dec. 20, 2019.
Claims priority of provisional application 62/978,133, filed on Feb. 18, 2020.
Claims priority of provisional application 62/993,586, filed on Mar. 23, 2020.
Claims priority of provisional application 63/112,395, filed on Nov. 11, 2020.
Claims priority of provisional application 63/012,849, filed on Apr. 20, 2020.
Claims priority of provisional application 63/066,520, filed on Aug. 17, 2020.
Claims priority of provisional application 63/074,991, filed on Sep. 4, 2020.
Claims priority of provisional application 62/892,871, filed on Aug. 28, 2019.
Claims priority of provisional application 63/144,977, filed on Feb. 3, 2021.
Claims priority of provisional application 63/053,584, filed on Jul. 18, 2020.
Claims priority of provisional application 63/088,344, filed on Oct. 6, 2020.
Prior Publication US 2022/0116015 A1, Apr. 14, 2022
an interdigital transducer (IDT) having interleaved fingers on the piezoelectric layer,
wherein a ratio of a mark of the interleaved fingers to a pitch of the interleaved fingers is greater than or equal to 0.12 and less than or equal to 0.45, wherein the pitch is a center-to-center spacing between two adjacent interleaved fingers, and
wherein a thickness of at least one the interleaved fingers is less than 0.5 times the thickness of the piezoelectric layer.
